JPH0345638U - - Google Patents
Info
- Publication number
- JPH0345638U JPH0345638U JP10637889U JP10637889U JPH0345638U JP H0345638 U JPH0345638 U JP H0345638U JP 10637889 U JP10637889 U JP 10637889U JP 10637889 U JP10637889 U JP 10637889U JP H0345638 U JPH0345638 U JP H0345638U
- Authority
- JP
- Japan
- Prior art keywords
- ring plate
- tube
- plasma
- vacuum vessel
- ashing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 6
- 230000001154 acute effect Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10637889U JPH0345638U (en]) | 1989-09-12 | 1989-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10637889U JPH0345638U (en]) | 1989-09-12 | 1989-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345638U true JPH0345638U (en]) | 1991-04-26 |
Family
ID=31655109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10637889U Pending JPH0345638U (en]) | 1989-09-12 | 1989-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345638U (en]) |
-
1989
- 1989-09-12 JP JP10637889U patent/JPH0345638U/ja active Pending
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